Mauro Ciappa

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Emre Ilgünsatiroglu

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Publications

2014
[j39]
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Mauro Ciappa, Alexey Yu. Illarionov, Emre Ilgünsatiroglu:
Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields. Microelectron. Reliab. 54(9-10): 2081-2087 (2014)
[j38]
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Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov:
Exploring the limits of scanning electron microscopy for the metrology of critical dimensions of photoresist structures in the nanometer range. Microelectron. Reliab. 54(9-10): 2123-2127 (2014)
[c3]
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Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov, F. Filosomi, C. Santini:
Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy. ESSDERC 2014: 357-360
2013
[j37]
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Emre Ilgünsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa:
Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications. Microelectron. Reliab. 53(9-11): 1381-1386 (2013)
2012
[j33]
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  - journals/mr/CiappaII12
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Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov:
Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies. Microelectron. Reliab. 52(9-10): 2139-2143 (2012)

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