BibTeX record journals/ibmrd/BuddDSMFW97

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@article{DBLP:journals/ibmrd/BuddDSMFW97,
  author       = {Russell A. Budd and
                  Derek B. Dove and
                  John L. Staples and
                  Ronald M. Martino and
                  Richard A. Ferguson and
                  J. Tracy Weed},
  title        = {Development and application of a new tool for lithographic mask evaluation,
                  the stepper equivalent Aerial Image Measurement System, {AIMS}},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {41},
  number       = {1{\&}2},
  pages        = {119--130},
  year         = {1997},
  url          = {https://doi.org/10.1147/rd.411.0119},
  doi          = {10.1147/RD.411.0119},
  timestamp    = {Fri, 13 Mar 2020 10:54:24 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/BuddDSMFW97.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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