BibTeX record journals/ibmrd/ShawGLCH97

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@article{DBLP:journals/ibmrd/ShawGLCH97,
  author       = {Jane M. Shaw and
                  Jeffrey D. Gelorme and
                  Nancy C. LaBianca and
                  Will E. Conley and
                  Steven J. Holmes},
  title        = {Negative photoresists for optical lithography},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {41},
  number       = {1{\&}2},
  pages        = {81--94},
  year         = {1997},
  url          = {https://doi.org/10.1147/rd.411.0081},
  doi          = {10.1147/RD.411.0081},
  timestamp    = {Fri, 13 Mar 2020 10:54:43 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/ShawGLCH97.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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