BibTeX record journals/mr/CazarreLMPTBMM03

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@article{DBLP:journals/mr/CazarreLMPTBMM03,
  author       = {A. Cazarr{\'{e}} and
                  F. L{\'{e}}pinois and
                  A. Marty and
                  S. Pinel and
                  J. Tasselli and
                  J. P. Bailb{\'{e}} and
                  J. R. Morante and
                  F. Murray},
  title        = {Electrical qualification of new ultrathin integration techniques},
  journal      = {Microelectron. Reliab.},
  volume       = {43},
  number       = {1},
  pages        = {111--115},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2714(02)00276-7},
  doi          = {10.1016/S0026-2714(02)00276-7},
  timestamp    = {Sat, 22 Feb 2020 19:29:18 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/CazarreLMPTBMM03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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