BibTeX record journals/mr/ChanWPK03

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@article{DBLP:journals/mr/ChanWPK03,
  author       = {Jackie Chan and
                  Hei Wong and
                  M. C. Poon and
                  Chi{-}Wah Kok},
  title        = {Oxynitride gate dielectric prepared by thermal oxidation of low-pressure
                  chemical vapor deposition silicon-rich silicon nitride},
  journal      = {Microelectron. Reliab.},
  volume       = {43},
  number       = {4},
  pages        = {611--616},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2714(03)00031-3},
  doi          = {10.1016/S0026-2714(03)00031-3},
  timestamp    = {Sat, 22 Feb 2020 19:29:06 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/ChanWPK03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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