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BibTeX record journals/mr/ChanWPK03
@article{DBLP:journals/mr/ChanWPK03, author = {Jackie Chan and Hei Wong and M. C. Poon and Chi{-}Wah Kok}, title = {Oxynitride gate dielectric prepared by thermal oxidation of low-pressure chemical vapor deposition silicon-rich silicon nitride}, journal = {Microelectron. Reliab.}, volume = {43}, number = {4}, pages = {611--616}, year = {2003}, url = {https://doi.org/10.1016/S0026-2714(03)00031-3}, doi = {10.1016/S0026-2714(03)00031-3}, timestamp = {Sat, 22 Feb 2020 19:29:06 +0100}, biburl = {https://dblp.org/rec/journals/mr/ChanWPK03.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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