BibTeX record journals/mr/ChenQACXS16

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@article{DBLP:journals/mr/ChenQACXS16,
  author       = {Si Chen and
                  Fei Qin and
                  Tong An and
                  Pei Chen and
                  Bin Xie and
                  Xunqing Shi},
  title        = {Protrusion of electroplated copper filled in through silicon vias
                  during annealing process},
  journal      = {Microelectron. Reliab.},
  volume       = {63},
  pages        = {183--193},
  year         = {2016},
  url          = {https://doi.org/10.1016/j.microrel.2016.04.005},
  doi          = {10.1016/J.MICROREL.2016.04.005},
  timestamp    = {Tue, 21 Mar 2023 21:14:33 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/ChenQACXS16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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