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BibTeX record journals/mr/ChenQACXS16
@article{DBLP:journals/mr/ChenQACXS16, author = {Si Chen and Fei Qin and Tong An and Pei Chen and Bin Xie and Xunqing Shi}, title = {Protrusion of electroplated copper filled in through silicon vias during annealing process}, journal = {Microelectron. Reliab.}, volume = {63}, pages = {183--193}, year = {2016}, url = {https://doi.org/10.1016/j.microrel.2016.04.005}, doi = {10.1016/J.MICROREL.2016.04.005}, timestamp = {Tue, 21 Mar 2023 21:14:33 +0100}, biburl = {https://dblp.org/rec/journals/mr/ChenQACXS16.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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