BibTeX record journals/mr/DombrowskiDWRB01

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@article{DBLP:journals/mr/DombrowskiDWRB01,
  author       = {Kai F. Dombrowski and
                  B. Dietrich and
                  Ingrid De Wolf and
                  R. Rooyackers and
                  G. Badenes},
  title        = {Investigation of stress in shallow trench isolation using {UV} micro-Raman
                  spectroscopy},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {4},
  pages        = {511--515},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(00)00260-2},
  doi          = {10.1016/S0026-2714(00)00260-2},
  timestamp    = {Sat, 22 Feb 2020 19:28:11 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/DombrowskiDWRB01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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