BibTeX record journals/mr/IlgunsatirogluIC13

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@article{DBLP:journals/mr/IlgunsatirogluIC13,
  author       = {Emre Ilg{\"{u}}nsatiroglu and
                  Alexey Yu. Illarionov and
                  Mauro Ciappa},
  title        = {Unstructured tetrahedric meshes for the description of complex three-dimensional
                  sample geometries in Monte Carlo simulation of scanning electron microscopy
                  images for metrology applications},
  journal      = {Microelectron. Reliab.},
  volume       = {53},
  number       = {9-11},
  pages        = {1381--1386},
  year         = {2013},
  url          = {https://doi.org/10.1016/j.microrel.2013.07.131},
  doi          = {10.1016/J.MICROREL.2013.07.131},
  timestamp    = {Sat, 22 Feb 2020 19:27:18 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/IlgunsatirogluIC13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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