BibTeX record journals/mr/ZhaoRBYHHNGHB01

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@article{DBLP:journals/mr/ZhaoRBYHHNGHB01,
  author       = {Chao Zhao and
                  Gert Roebben and
                  Hugo Bender and
                  Edward Young and
                  S. Haukka and
                  Michel Houssa and
                  Mohamed Naili and
                  Stefan De Gendt and
                  Marc M. Heyns and
                  Omer Van der Biest},
  title        = {In situ crystallisation in ZrO\({}_{\mbox{2}}\) thin films during
                  high temperature X-ray diffraction},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {7},
  pages        = {995--998},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(01)00055-5},
  doi          = {10.1016/S0026-2714(01)00055-5},
  timestamp    = {Sun, 02 Oct 2022 15:44:05 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/ZhaoRBYHHNGHB01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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