BibTeX record journals/tcad/YangLPZYZZ16

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@article{DBLP:journals/tcad/YangLPZYZZ16,
  author       = {Yunfeng Yang and
                  Wai{-}Shing Luk and
                  David Z. Pan and
                  Hai Zhou and
                  Changhao Yan and
                  Dian Zhou and
                  Xuan Zeng},
  title        = {Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple
                  Patterning Lithography},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {35},
  number       = {9},
  pages        = {1532--1545},
  year         = {2016},
  url          = {https://doi.org/10.1109/TCAD.2015.2512903},
  doi          = {10.1109/TCAD.2015.2512903},
  timestamp    = {Wed, 16 Aug 2023 21:16:33 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/YangLPZYZZ16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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