BibTeX record journals/tcad/YuanYP12

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@article{DBLP:journals/tcad/YuanYP12,
  author       = {Kun Yuan and
                  Bei Yu and
                  David Z. Pan},
  title        = {E-Beam Lithography Stencil Planning and Optimization With Overlapped
                  Characters},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {31},
  number       = {2},
  pages        = {167--179},
  year         = {2012},
  url          = {https://doi.org/10.1109/TCAD.2011.2179041},
  doi          = {10.1109/TCAD.2011.2179041},
  timestamp    = {Thu, 24 Sep 2020 11:27:59 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/YuanYP12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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