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BibTeX record journals/tsmc/YangWQZL17
@article{DBLP:journals/tsmc/YangWQZL17, author = {FaJun Yang and Naiqi Wu and Yan Qiao and MengChu Zhou and ZhiWu Li}, title = {Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints}, journal = {{IEEE} Trans. Syst. Man Cybern. Syst.}, volume = {47}, number = {3}, pages = {502--516}, year = {2017}, url = {https://doi.org/10.1109/TSMC.2015.2507140}, doi = {10.1109/TSMC.2015.2507140}, timestamp = {Fri, 29 Apr 2022 15:37:30 +0200}, biburl = {https://dblp.org/rec/journals/tsmc/YangWQZL17.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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