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"A practical yield prediction approach using inline defect metrology data ..."

Yuting Kong, Dong Ni (2017)

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DOI: 10.1109/COASE.2017.8256193

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-01

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Yuting Kong, Dong Ni:
A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits. CASE 2017: 744-749

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