"Scheduling of time constrained dual-arm cluster tools with wafer revisiting."

Yan Qiao, Naiqi Wu, MengChu Zhou (2013)

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DOI: 10.1109/COASE.2013.6653916

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Yan Qiao, Naiqi Wu, MengChu Zhou:
Scheduling of time constrained dual-arm cluster tools with wafer revisiting. CASE 2013: 868-873

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