"Virtual metrology enabled early stage prediction for enhanced control of ..."

Gian Antonio Susto et al. (2013)

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DOI: 10.1109/COASE.2013.6653980

access: closed

type: Conference or Workshop Paper

metadata version: 2019-06-02

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Gian Antonio Susto, Adrian B. Johnston, Paul G. O'Hara, Seán F. McLoone:
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes. CASE 2013: 201-206

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