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"A novel approach to scheduling of single-arm cluster tools with wafer ..."

Naiqi Wu et al. (2009)

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DOI: 10.1109/COASE.2009.5234146

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-30

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Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou:
A novel approach to scheduling of single-arm cluster tools with wafer revisiting. CASE 2009: 567-572

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