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"Frequency domain decomposition of layouts for double dipole lithography."

Kanak Agarwal (2010)

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DOI: 10.1145/1837274.1837374

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Kanak Agarwal:
Frequency domain decomposition of layouts for double dipole lithography. DAC 2010: 404-407

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