"Frequency domain decomposition of layouts for double dipole lithography."

Kanak Agarwal (2010)

> Home

Details and statistics

DOI: 10.1145/1837274.1837374

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/dac/Agarwal10
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/dac/Agarwal10
Kanak Agarwal:
Frequency domain decomposition of layouts for double dipole lithography. DAC 2010: 404-407

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.