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"Flexible 2D layout decomposition framework for spacer-type double ..."

Yongchan Ban, Kevin Lucas, David Z. Pan (2011)

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DOI: 10.1145/2024724.2024901

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Yongchan Ban, Kevin Lucas, David Z. Pan:
Flexible 2D layout decomposition framework for spacer-type double pattering lithography. DAC 2011: 789-794

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