"A cost-driven lithographic correction methodology based on off-the-shelf ..."

Puneet Gupta et al. (2003)

> Home

Details and statistics

DOI: 10.1145/775832.775840

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-28

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/dac/GuptaKSY03
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/dac/GuptaKSY03
Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, Jie Yang:
A cost-driven lithographic correction methodology based on off-the-shelf sizing tools. DAC 2003: 16-21

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.