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"Pushing multiple patterning in sub-10nm: are we ready?"

David Z. Pan et al. (2015)

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DOI: 10.1145/2744769.2747940

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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  dblp key:
  - conf/dac/PanLYXL15
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  - https://dblp.org/rec/conf/dac/PanLYXL15
David Z. Pan, Lars Liebmann, Bei Yu, Xiaoqing Xu, Yibo Lin:
Pushing multiple patterning in sub-10nm: are we ready? DAC 2015: 197:1-197:6

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