"Electrical calibration of spring-mass MEMS capacitive accelerometers."

Lingfei Deng et al. (2013)

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DOI: 10.7873/DATE.2013.126

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - https://dblp.org/rec/conf/date/DengKNOYOBKPD13
Lingfei Deng, Vinay Kundur, Naveen Sai Jangala Naga, Muhlis Kenan Ozel, Ender Yilmaz, Sule Ozev, Bertan Bakkaloglu, Sayfe Kiaei, Divya Pratab, Tehmoor Dar:
Electrical calibration of spring-mass MEMS capacitive accelerometers. DATE 2013: 571-574

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