BibTeX records: I. Genchev

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@article{DBLP:journals/mr/StadlerGBDPHBE01,
  author    = {A. Stadler and
               I. Genchev and
               A. Bergmaier and
               G. Dollinger and
               V. Petrova{-}Koch and
               Walter Hansch and
               H. Baumg{\"{a}}rtner and
               I. Eisele},
  title     = {Nitrogen implantations for rapid thermal oxinitride layers},
  journal   = {Microelectronics Reliability},
  volume    = {41},
  number    = {7},
  pages     = {977--980},
  year      = {2001},
  url       = {https://doi.org/10.1016/S0026-2714(01)00051-8},
  doi       = {10.1016/S0026-2714(01)00051-8},
  timestamp = {Sun, 28 May 2017 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/mr/StadlerGBDPHBE01},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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