BibTeX records: Mitsumasa Koyanagi

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@inproceedings{DBLP:conf/3dic/MurugesanSSMKF23,
  author       = {Mariappan Murugesan and
                  M. Sawa and
                  E. Sone and
                  Makoto Motoyoshi and
                  Mitsumasa Koyanagi and
                  Takafumi Fukushima},
  title        = {Copper Electrode Surface Features and Cu-SiO2Hybrid Bonding},
  booktitle    = {{IEEE} International 3D Systems Integration Conference, 3DIC 2023,
                  Cork, Ireland, May 10-12, 2023},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/3DIC57175.2023.10154924},
  doi          = {10.1109/3DIC57175.2023.10154924},
  timestamp    = {Mon, 10 Jul 2023 15:09:43 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanSSMKF23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/ShenLHSKTMKF23,
  author       = {Jiayi Shen and
                  Chang Liu and
                  Tadaaki Hoshi and
                  Atsushi Sinoda and
                  Hisashi Kino and
                  Tetsu Tanaka and
                  Mariappan Murugesan and
                  Mitsumasa Koyanagi and
                  Takafumi Fukushima},
  title        = {Impact of Super-long-throw {PVD} on {TSV} Metallization and Die-to-Wafer
                  3D Integration Based on Via-last},
  booktitle    = {{IEEE} International 3D Systems Integration Conference, 3DIC 2023,
                  Cork, Ireland, May 10-12, 2023},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/3DIC57175.2023.10154930},
  doi          = {10.1109/3DIC57175.2023.10154930},
  timestamp    = {Mon, 10 Jul 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/ShenLHSKTMKF23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaSTHBMK21,
  author       = {Takafumi Fukushima and
                  Shinichi Sakuyama and
                  Masatomo Takahashi and
                  Hiroyuki Hashimoto and
                  Jichoel Bea and
                  Theodorus Marcello and
                  Hisashi Kino and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi and
                  Mariappan Murugesan},
  title        = {Integration of Damage-less Probe Cards Using Nano-TSV Technology for
                  Microbumped Wafer Testing},
  booktitle    = {{IEEE} International 3D Systems Integration Conference, 3DIC 2021,
                  Raleigh, NC, USA, October 26-29, 2021},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/3DIC52383.2021.9687601},
  doi          = {10.1109/3DIC52383.2021.9687601},
  timestamp    = {Fri, 18 Feb 2022 10:36:41 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaSTHBMK21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/HorioOKK21,
  author       = {Yoshihiko Horio and
                  Takemori Orima and
                  Koji Kiyoyama and
                  Mitsumasa Koyanagi},
  title        = {Implementation of a Chaotic Neural Network Reservoir on a TSV/{\textdollar}{\textbackslash}mu{\textbackslash}text\{Bump\}{\textdollar}
                  Stacked 3D Cyclic Neural Network Integrated Circuit},
  booktitle    = {{IEEE} International 3D Systems Integration Conference, 3DIC 2021,
                  Raleigh, NC, USA, October 26-29, 2021},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/3DIC52383.2021.9687614},
  doi          = {10.1109/3DIC52383.2021.9687614},
  timestamp    = {Wed, 23 Feb 2022 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/HorioOKK21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KiyoyamaHFHOK21,
  author       = {Koji Kiyoyama and
                  Yoshihiko Horio and
                  Takafumi Fukushima and
                  Hiroyuki Hashimoto and
                  Takemori Orima and
                  Mitsumasa Koyanagi},
  title        = {Design for 3-D Stacked Neural Network Circuit with Cyclic Analog Computing},
  booktitle    = {{IEEE} International 3D Systems Integration Conference, 3DIC 2021,
                  Raleigh, NC, USA, October 26-29, 2021},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/3DIC52383.2021.9687608},
  doi          = {10.1109/3DIC52383.2021.9687608},
  timestamp    = {Wed, 23 Feb 2022 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/KiyoyamaHFHOK21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanSSMSFK21,
  author       = {Mariappan Murugesan and
                  E. Sone and
                  A. Simomura and
                  Makoto Motoyoshi and
                  M. Sawa and
                  K. Fukuda and
                  Mitsumasa Koyanagi and
                  Takafumi Fukushima},
  title        = {Cu-Cu Direct Bonding Through Highly Oriented Cu Grains for 3D-LSI
                  Applications},
  booktitle    = {{IEEE} International 3D Systems Integration Conference, 3DIC 2021,
                  Raleigh, NC, USA, October 26-29, 2021},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/3DIC52383.2021.9687604},
  doi          = {10.1109/3DIC52383.2021.9687604},
  timestamp    = {Fri, 18 Feb 2022 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanSSMSFK21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/vlsi-dat/Koyanagi20,
  author       = {Mitsumasa Koyanagi},
  title        = {3D Heterogeneous Integration Technology for {AI} System},
  booktitle    = {2020 International Symposium on {VLSI} Design, Automation and Test,
                  {VLSI-DAT} 2020, Hsinchu, Taiwan, August 10-13, 2020},
  pages        = {1},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/VLSI-DAT49148.2020.9196249},
  doi          = {10.1109/VLSI-DAT49148.2020.9196249},
  timestamp    = {Tue, 29 Sep 2020 11:35:15 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsi-dat/Koyanagi20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KurookaHNKF19,
  author       = {Shunji Kurooka and
                  Yoshinori Hotta and
                  Ai Nakamura and
                  Mitsumasa Koyanagi and
                  Takafumi Fukushima},
  title        = {Cu-Cu Bonding Challenges with 'i-ACF' for Advanced 3D Integration},
  booktitle    = {2019 International 3D Systems Integration Conference (3DIC), Sendai,
                  Japan, October 8-10, 2019},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/3DIC48104.2019.9058773},
  doi          = {10.1109/3DIC48104.2019.9058773},
  timestamp    = {Sun, 19 Apr 2020 18:46:53 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/KurookaHNKF19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanKF19,
  author       = {Mariappan Murugesan and
                  Mitsumasa Koyanagi and
                  Takafumi Fukushima},
  title        = {Growth Optimization of Multi-Layer Graphene for Thermal-TSV Application
                  in 3D-LSI},
  booktitle    = {2019 International 3D Systems Integration Conference (3DIC), Sendai,
                  Japan, October 8-10, 2019},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/3DIC48104.2019.9058853},
  doi          = {10.1109/3DIC48104.2019.9058853},
  timestamp    = {Sun, 19 Apr 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanKF19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanKHBF19,
  author       = {Mariappan Murugesan and
                  Mitsumasa Koyanagi and
                  Hiroyuki Hashimoto and
                  Ji Chel Bea and
                  Takafumi Fukushima},
  title        = {Fabrication and Morphological Characterization of Nano-Scale Interconnects
                  for 3D-Integration},
  booktitle    = {2019 International 3D Systems Integration Conference (3DIC), Sendai,
                  Japan, October 8-10, 2019},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/3DIC48104.2019.9058849},
  doi          = {10.1109/3DIC48104.2019.9058849},
  timestamp    = {Sun, 19 Apr 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanKHBF19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/micromachines/FukushimaHYKMBL16,
  author       = {Takafumi Fukushima and
                  Hideto Hashiguchi and
                  Hiroshi Yonekura and
                  Hisashi Kino and
                  Mariappan Murugesan and
                  Ji Chel Bea and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Oxide-Oxide Thermocompression Direct Bonding Technologies with Capillary
                  Self-Assembly for Multichip-to-Wafer Heterogeneous 3D System Integration},
  journal      = {Micromachines},
  volume       = {7},
  number       = {10},
  pages        = {184},
  year         = {2016},
  url          = {https://doi.org/10.3390/mi7100184},
  doi          = {10.3390/MI7100184},
  timestamp    = {Thu, 14 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/FukushimaHYKMBL16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaMOHBLT16,
  author       = {Takafumi Fukushima and
                  Mariappan Murugesan and
                  Shin Ohsaki and
                  Hiroyuki Hashimoto and
                  Jichoel Bea and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {New concept of {TSV} formation methodology using Directed Self-Assembly
                  {(DSA)}},
  booktitle    = {2016 {IEEE} International 3D Systems Integration Conference, 3DIC
                  2016, San Francisco, CA, USA, November 8-11, 2016},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/3DIC.2016.7970022},
  doi          = {10.1109/3DIC.2016.7970022},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaMOHBLT16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/LeeNBFRWTK16,
  author       = {Kang Wook Lee and
                  Ai Nakamura and
                  Jicheol Bea and
                  Takafumi Fukushima and
                  Suresh Ramalingam and
                  Xin Wu and
                  Tanaka Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Nano-scale Cu direct bonding using ultra-high density Cu nano-pillar
                  {(CNP)} for high yield exascale 2.5/3D integration applications},
  booktitle    = {2016 {IEEE} International 3D Systems Integration Conference, 3DIC
                  2016, San Francisco, CA, USA, November 8-11, 2016},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/3DIC.2016.7970027},
  doi          = {10.1109/3DIC.2016.7970027},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/LeeNBFRWTK16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MotoyoshiYFTMAK16,
  author       = {Makoto Motoyoshi and
                  Kohki Yanagimura and
                  Taikoh Fushimi and
                  Junichi Takanohashi and
                  Mariappan Murugesan and
                  Masahiro Aoyagi and
                  Mitsumasa Koyanagi},
  title        = {3 Dimensional stacked pixel detector and sensor technology using less
                  than 3-{\(\mu\)}m{\(\varphi\)} robust bump junctions},
  booktitle    = {2016 {IEEE} International 3D Systems Integration Conference, 3DIC
                  2016, San Francisco, CA, USA, November 8-11, 2016},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/3DIC.2016.7970029},
  doi          = {10.1109/3DIC.2016.7970029},
  timestamp    = {Thu, 13 Jul 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/MotoyoshiYFTMAK16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanBFMTK16,
  author       = {Mariappan Murugesan and
                  Jichel Bea and
                  Takafumi Fukushima and
                  Makoto Motoyoshi and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Improving the integrity of Ti barrier layer in Cu-TSVs through self-formed
                  TiSix for via-last {TSV} technology},
  booktitle    = {2016 {IEEE} International 3D Systems Integration Conference, 3DIC
                  2016, San Francisco, CA, USA, November 8-11, 2016},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/3DIC.2016.7970017},
  doi          = {10.1109/3DIC.2016.7970017},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanBFMTK16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/ieiceee/Koyanagi15,
  author       = {Mitsumasa Koyanagi},
  title        = {Recent progress in 3D integration technology},
  journal      = {{IEICE} Electron. Express},
  volume       = {12},
  number       = {7},
  pages        = {20152001},
  year         = {2015},
  url          = {https://doi.org/10.1587/elex.12.20152001},
  doi          = {10.1587/ELEX.12.20152001},
  timestamp    = {Fri, 12 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/ieiceee/Koyanagi15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/LeeNNABKHFT15,
  author       = {K. W. Lee and
                  Chisato Nagai and
                  Ai Nakamura and
                  Hiroki Aizawa and
                  Ji Chel Bea and
                  Mitsumasa Koyanagi and
                  Hideto Hashiguchi and
                  Takafumi Fukushima and
                  Tanaka Tanaka},
  title        = {Reconfigured multichip-on-wafer (mCoW) Cu/oxide hybrid bonding technology
                  for ultra-high density 3D integration using recessed oxide, thin glue
                  adhesive, and thin metal capping layers},
  booktitle    = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai,
                  Japan, August 31 - September 2, 2015},
  pages        = {TS1.2.1--TS1.2.4},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/3DIC.2015.7334471},
  doi          = {10.1109/3DIC.2015.7334471},
  timestamp    = {Mon, 06 Sep 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/LeeNNABKHFT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/TanikawaKFKT15,
  author       = {Seiya Tanikawa and
                  Hisashi Kino and
                  Takafumi Fukushima and
                  Mitsumasa Koyanagi and
                  Tetsu Tanaka},
  title        = {Novel local stress evaluation method in 3D {IC} using {DRAM} cell
                  array with planar mOS capacitors},
  booktitle    = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai,
                  Japan, August 31 - September 2, 2015},
  pages        = {TS3.1.1--TS3.1.4},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/3DIC.2015.7334557},
  doi          = {10.1109/3DIC.2015.7334557},
  timestamp    = {Thu, 14 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/TanikawaKFKT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/YanDCLFK15,
  author       = {Yangyang Yan and
                  Yingtao Ding and
                  Qianwen Chen and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Mitsumasa Koyanagi},
  title        = {Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio
                  TSVs applications},
  booktitle    = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai,
                  Japan, August 31 - September 2, 2015},
  pages        = {TS5.2.1--TS5.2.5},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/3DIC.2015.7334568},
  doi          = {10.1109/3DIC.2015.7334568},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/YanDCLFK15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaSHNBHM15,
  author       = {Takafumi Fukushima and
                  Taku Suzuki and
                  Hideto Hashiguchi and
                  Chisato Nagai and
                  Jichoel Bea and
                  Hiroyuki Hashimoto and
                  Mariappan Murugesan and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Kazushi Asami and
                  Yasuhiro Kitamura and
                  Mitsumasa Koyanagi},
  title        = {Transfer and non-transfer stacking technologies based on chip-to-wafer
                  self-asembly for high-throughput and high-precision alignment and
                  microbump bonding},
  booktitle    = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai,
                  Japan, August 31 - September 2, 2015},
  pages        = {TS7.4.1--TS7.4.4},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/3DIC.2015.7334578},
  doi          = {10.1109/3DIC.2015.7334578},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaSHNBHM15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KinoHTSIFKT15,
  author       = {Hisashi Kino and
                  Hideto Hashiguchi and
                  Seiya Tanikawa and
                  Yohei Sugawara and
                  Shunsuke Ikegaya and
                  Takafumi Fukushima and
                  Mitsumasa Koyanagi and
                  Tetsu Tanaka},
  title        = {Consideration of microbump layout for reduction of local bending stress
                  due to {CTE} Mismatch in 3D {IC}},
  booktitle    = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai,
                  Japan, August 31 - September 2, 2015},
  pages        = {TS8.26.1--TS8.26.4},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/3DIC.2015.7334596},
  doi          = {10.1109/3DIC.2015.7334596},
  timestamp    = {Thu, 14 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/KinoHTSIFKT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/irps/LeeBMFTK15,
  author       = {Kang Wook Lee and
                  Ji Chel Bea and
                  Mariappan Murugesan and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Impacts of 3-D integration processes on device reliabilities in thinned
                  {DRAM} chip for 3-D {DRAM}},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2015, Monterey,
                  CA, USA, April 19-23, 2015},
  pages        = {4},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/IRPS.2015.7112733},
  doi          = {10.1109/IRPS.2015.7112733},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/irps/LeeBMFTK15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaIMBLCT14,
  author       = {Takafumi Fukushima and
                  Yuka Ito and
                  Mariappan Murugesan and
                  Jicheol Bea and
                  Kang Wook Lee and
                  Koji Choki and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Tiny {VCSEL} chip self-assembly for advanced chip-to-wafer 3D and
                  hetero integration},
  booktitle    = {2014 International 3D Systems Integration Conference, 3DIC 2014, Kinsdale,
                  Ireland, December 1-3, 2014},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/3DIC.2014.7152145},
  doi          = {10.1109/3DIC.2014.7152145},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaIMBLCT14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/LeeNNBMFTK14,
  author       = {K. W. Lee and
                  Chisato Nagai and
                  Ai Nakamura and
                  Ji Chel Bea and
                  Mariappan Murugesan and
                  Takafumi Fukushima and
                  Tanaka Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Effects of electro-less Ni layer as barrier/seed layers for high reliable
                  and low cost Cu {TSV}},
  booktitle    = {2014 International 3D Systems Integration Conference, 3DIC 2014, Kinsdale,
                  Ireland, December 1-3, 2014},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/3DIC.2014.7152153},
  doi          = {10.1109/3DIC.2014.7152153},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/LeeNNBMFTK14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaBMLK13,
  author       = {Takafumi Fukushima and
                  Jichoel Bea and
                  Mariappan Murugesan and
                  Kang Wook Lee and
                  Mitsumasa Koyanagi},
  title        = {Development of via-last 3D integration technologies using a new temporary
                  adhesive system},
  booktitle    = {2013 {IEEE} International 3D Systems Integration Conference (3DIC),
                  San Francisco, CA, USA, October 2-4, 2013},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/3DIC.2013.6702383},
  doi          = {10.1109/3DIC.2013.6702383},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaBMLK13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaBMSSBKLK13,
  author       = {Takafumi Fukushima and
                  Jichoel Bea and
                  Mariappan Murugesan and
                  Ho{-}Young Son and
                  M.{-}S. Suh and
                  K.{-}Y. Byun and
                  N.{-}S. Kim and
                  Kang Wook Lee and
                  Mitsumasa Koyanagi},
  title        = {3D memory chip stacking by multi-layer self-assembly technology},
  booktitle    = {2013 {IEEE} International 3D Systems Integration Conference (3DIC),
                  San Francisco, CA, USA, October 2-4, 2013},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/3DIC.2013.6702360},
  doi          = {10.1109/3DIC.2013.6702360},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaBMSSBKLK13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/HashimotoFLKT13,
  author       = {Hiroyuki Hashimoto and
                  Takafumi Fukushima and
                  Kang Wook Lee and
                  Mitsumasa Koyanagi and
                  Tetsu Tanaka},
  title        = {Highly efficient {TSV} repair technology for resilient 3-D stacked
                  multicore processor system},
  booktitle    = {2013 {IEEE} International 3D Systems Integration Conference (3DIC),
                  San Francisco, CA, USA, October 2-4, 2013},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/3DIC.2013.6702338},
  doi          = {10.1109/3DIC.2013.6702338},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/HashimotoFLKT13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KiyoyamaSHLFTK13,
  author       = {Kouji Kiyoyama and
                  Y. Sato and
                  Hiroyuki Hashimoto and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {A block-parallel {ADC} with digital noise cancelling for 3-D stacked
                  {CMOS} image sensor},
  booktitle    = {2013 {IEEE} International 3D Systems Integration Conference (3DIC),
                  San Francisco, CA, USA, October 2-4, 2013},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/3DIC.2013.6702363},
  doi          = {10.1109/3DIC.2013.6702363},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/KiyoyamaSHLFTK13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/LeeTMNBFTK13,
  author       = {Kang Wook Lee and
                  Seiya Tanikawa and
                  Mariappan Murugesan and
                  H. Naganuma and
                  Jichoel Bea and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Impact of 3-D integration process on memory retention characteristics
                  in thinned {DRAM} chip for 3-D memory},
  booktitle    = {2013 {IEEE} International 3D Systems Integration Conference (3DIC),
                  San Francisco, CA, USA, October 2-4, 2013},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/3DIC.2013.6702336},
  doi          = {10.1109/3DIC.2013.6702336},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/LeeTMNBFTK13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanBLFTKSWK13,
  author       = {Mariappan Murugesan and
                  Jichoel Bea and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi and
                  Yuji Sutou and
                  H. Wang and
                  J. Koike},
  title        = {Effect of {CVD} Mn oxide layer as Cu diffusion barrier for {TSV}},
  booktitle    = {2013 {IEEE} International 3D Systems Integration Conference (3DIC),
                  San Francisco, CA, USA, October 2-4, 2013},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/3DIC.2013.6702364},
  doi          = {10.1109/3DIC.2013.6702364},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanBLFTKSWK13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/isscc/ShibataKH12,
  author       = {Noboru Shibata and
                  Kazushige Kanda and
                  Toshiki Hisada and
                  Katsuaki Isobe and
                  Manabu Sato and
                  Yui Shimizu and
                  Takahiro Shimizu and
                  Takahiro Sugimoto and
                  Tomohiro Kobayashi and
                  Kazuko Inuzuka and
                  Naoaki Kanagawa and
                  Yasuyuki Kajitani and
                  Takeshi Ogawa and
                  J. Nakai and
                  Kiyoaki Iwasa and
                  Masatsugu Kojima and
                  Toshihiro Suzuki and
                  Yuya Suzuki and
                  Shintaro Sakai and
                  Tomofumi Fujimura and
                  Yuko Utsunomiya and
                  Toshifumi Hashimoto and
                  Makoto Miakashi and
                  Naoki Kobayashi and
                  M. Inagaki and
                  Yuuki Matsumoto and
                  Satoshi Inoue and
                  Yoshinao Suzuki and
                  D. He and
                  Yasuhiko Honda and
                  Junji Musha and
                  Masaki Nakagawa and
                  Mitsuaki Honma and
                  Naofumi Abiko and
                  Mitsumasa Koyanagi and
                  Masahiro Yoshihara and
                  Kazumi Ino and
                  Mitsuhiro Noguchi and
                  Teruhiko Kamei and
                  Yosuke Kato and
                  Shingo Zaitsu and
                  Hiroaki Nasu and
                  Takuya Ariki and
                  Hardwell Chibvongodze and
                  Mitsuyuki Watanabe and
                  Hong Ding and
                  Naoki Ookuma and
                  Ryuji Yamashita and
                  G. Liang and
                  Gertjan Hemink and
                  Farookh Moogat and
                  Cuong Trinh and
                  Masaaki Higashitani and
                  Tuan Pham and
                  Kousuke Kanazawa},
  title        = {A 19nm 112.8mm\({}^{\mbox{2}}\) 64Gb multi-level flash memory with
                  400Mb/s/pin 1.8V Toggle Mode interface},
  booktitle    = {2012 {IEEE} International Solid-State Circuits Conference, {ISSCC}
                  2012, San Francisco, CA, USA, February 19-23, 2012},
  pages        = {422--424},
  publisher    = {{IEEE}},
  year         = {2012},
  url          = {https://doi.org/10.1109/ISSCC.2012.6177073},
  doi          = {10.1109/ISSCC.2012.6177073},
  timestamp    = {Wed, 10 Mar 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/isscc/ShibataKH12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/3dic/2011,
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  publisher    = {{IEEE}},
  year         = {2012},
  url          = {https://ieeexplore.ieee.org/xpl/conhome/6253019/proceeding},
  isbn         = {978-1-4673-2189-1},
  timestamp    = {Wed, 16 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/2011.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/micromachines/FukushimaKIKKMBLTK11,
  author       = {Takafumi Fukushima and
                  Takayuki Konno and
                  Eiji Iwata and
                  Risato Kobayashi and
                  Toshiya Kojima and
                  Mariappan Murugesan and
                  Ji Chel Bea and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Self-Assembly of Chip-Size Components with Cavity Structures: High-Precision
                  Alignment and Direct Bonding without Thermal Compression for Hetero
                  Integration},
  journal      = {Micromachines},
  volume       = {2},
  number       = {1},
  pages        = {49--68},
  year         = {2011},
  url          = {https://doi.org/10.3390/mi2010049},
  doi          = {10.3390/MI2010049},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/micromachines/FukushimaKIKKMBLTK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaOBMLTK11,
  author       = {Takafumi Fukushima and
                  Yuki Ohara and
                  Jichoel Bea and
                  Mariappan Murugesan and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {Temporary bonding strength control for self-assembly-based 3D integration},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262954},
  doi          = {10.1109/3DIC.2012.6262954},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaOBMLTK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/HozawaFHATSLFK11,
  author       = {Kazuyuki Hozawa and
                  Futoshi Furuta and
                  Yuko Hanaoka and
                  Mayu Aoki and
                  Kenichi Takeda and
                  Katsuyuki Sakuma and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {Chip-level {TSV} integration for rapid prototyping of 3D system LSIs},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262952},
  doi          = {10.1109/3DIC.2012.6262952},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/HozawaFHATSLFK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/ItoTACFK11,
  author       = {Yuka Ito and
                  Shinsuke Terada and
                  Shinya Arai and
                  Koji Choki and
                  Takafumi Fukushima and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {High-bandwidth data transmission of new transceiver module through
                  optical interconnection},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6263010},
  doi          = {10.1109/3DIC.2012.6263010},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/ItoTACFK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KiyoyamaLFNKTK11,
  author       = {Kouji Kiyoyama and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  H. Naganuma and
                  H. Kobayashi and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {A very low area {ADC} for 3-D stacked {CMOS} image processing system},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262958},
  doi          = {10.1109/3DIC.2012.6262958},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/KiyoyamaLFNKTK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/LeeBFOTK11,
  author       = {Kang Wook Lee and
                  Jichoel Bea and
                  Takafumi Fukushima and
                  Yuki Ohara and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {High reliable and fine size of 5-{\(\mu\)}m diameter backside Cu through-silicon
                  Via(TSV) for high reliability and high-end 3-D LSIs},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262975},
  doi          = {10.1109/3DIC.2012.6262975},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/LeeBFOTK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MotoyoshiTFAK11,
  author       = {Makoto Motoyoshi and
                  Junichi Takanohashi and
                  Takafumi Fukushima and
                  Yasuo Arai and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {Stacked {SOI} pixel detector using versatile fine pitch {\(\mu\)}-bump
                  technology},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262959},
  doi          = {10.1109/3DIC.2012.6262959},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/MotoyoshiTFAK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanHKFTK11,
  author       = {Mariappan Murugesan and
                  Hideto Hashiguchi and
                  Harufumi Kobayashi and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {W/Cu TSVs for 3D-LSI with minimum thermo-mechanical stress},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262970},
  doi          = {10.1109/3DIC.2012.6262970},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanHKFTK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanKFTK11,
  author       = {Mariappan Murugesan and
                  Harufumi Kobayashi and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {High density Cu-TSVs and reliability issues},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262969},
  doi          = {10.1109/3DIC.2012.6262969},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanKFTK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/NorikiLBFFK11,
  author       = {Akihiro Noriki and
                  Kang Wook Lee and
                  Jichoel Bea and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {Fabrication tolerance evaluation of high efficient unidirectional
                  optical coupler for though silicon photonic via in optoelectronic
                  3D-LSI},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262957},
  doi          = {10.1109/3DIC.2012.6262957},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/NorikiLBFFK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/OharaLFTK11,
  author       = {Yuki Ohara and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {Novel detachable bonding process with wettability control of bonding
                  surface for versatile chip-level 3D integration},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262950},
  doi          = {10.1109/3DIC.2012.6262950},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/OharaLFTK11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/islped/Koyanagi11,
  author       = {Mitsumasa Koyanagi},
  editor       = {Naehyuck Chang and
                  Hiroshi Nakamura and
                  Koji Inoue and
                  Kenichi Osada and
                  Massimo Poncino},
  title        = {3D super chip technology to achieve low-power and high-performance
                  system-on-a chip},
  booktitle    = {Proceedings of the 2011 International Symposium on Low Power Electronics
                  and Design, 2011, Fukuoka, Japan, August 1-3, 2011},
  pages        = {61--62},
  publisher    = {{IEEE/ACM}},
  year         = {2011},
  url          = {http://portal.acm.org/citation.cfm?id=2016819\&\#38;CFID=34981777\&\#38;CFTOKEN=25607807},
  timestamp    = {Mon, 13 Aug 2012 09:40:34 +0200},
  biburl       = {https://dblp.org/rec/conf/islped/Koyanagi11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaIBMLTK10,
  author       = {Takafumi Fukushima and
                  Eiji Iwata and
                  Jichoel Bea and
                  Mariappan Murugesan and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Evaluation of alignment accuracy on chip-to-wafer self-assembly and
                  mechanism on the direct chip bonding at room temperature},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2010,
                  Munich, Germany, 16-18 November 2010},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/3DIC.2010.5751436},
  doi          = {10.1109/3DIC.2010.5751436},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaIBMLTK10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KiyoyamaLFNKTK10,
  author       = {Kouji Kiyoyama and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  H. Naganuma and
                  Hiroaki Kobayashi and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {A block-parallel signal processing system for {CMOS} image sensor
                  with three-dimensional structure},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2010,
                  Munich, Germany, 16-18 November 2010},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/3DIC.2010.5751479},
  doi          = {10.1109/3DIC.2010.5751479},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/KiyoyamaLFNKTK10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/MurugesanOBLFTK10,
  author       = {Mariappan Murugesan and
                  Yuki Ohara and
                  Jichoel Bea and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Impact of microbump induced stress in thinned 3D-LSIs after wafer
                  bonding},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2010,
                  Munich, Germany, 16-18 November 2010},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/3DIC.2010.5751432},
  doi          = {10.1109/3DIC.2010.5751432},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/MurugesanOBLFTK10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/NorikiLBFTK10,
  author       = {Akihiro Noriki and
                  Kang Wook Lee and
                  Jichoel Bea and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Through Silicon photonic via {(TSPV)} with Si core for low loss and
                  high-speed data transmission in opto-electronic 3-D {LSI}},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2010,
                  Munich, Germany, 16-18 November 2010},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/3DIC.2010.5751435},
  doi          = {10.1109/3DIC.2010.5751435},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/NorikiLBFTK10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/cicc/KoyanagiFT10,
  author       = {Mitsumasa Koyanagi and
                  Takafumi Fukushima and
                  Tetsu Tanaka},
  editor       = {Jacqueline Snyder and
                  Rakesh Patel and
                  Tom Andre},
  title        = {Three-dimensional integration technology using through-si via based
                  on reconfigured wafer-to-wafer bonding},
  booktitle    = {{IEEE} Custom Integrated Circuits Conference, {CICC} 2010, San Jose,
                  California, USA, 19-22 September, 2010, Proceedings},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/CICC.2010.5617626},
  doi          = {10.1109/CICC.2010.5617626},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/cicc/KoyanagiFT10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/pieee/KoyanagiFT09,
  author       = {Mitsumasa Koyanagi and
                  Takafumi Fukushima and
                  Tetsu Tanaka},
  title        = {High-Density Through Silicon Vias for 3-D LSIs},
  journal      = {Proc. {IEEE}},
  volume       = {97},
  number       = {1},
  pages        = {49--59},
  year         = {2009},
  url          = {https://doi.org/10.1109/JPROC.2008.2007463},
  doi          = {10.1109/JPROC.2008.2007463},
  timestamp    = {Fri, 02 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/journals/pieee/KoyanagiFT09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/BeaMONKLFTK09,
  author       = {Ji Chel Bea and
                  Mariappan Murugesan and
                  Yuki Ohara and
                  Akihiro Noriki and
                  Hisashi Kino and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement
                  of thinned silicon substrates for 3D integration},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306568},
  doi          = {10.1109/3DIC.2009.5306568},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/BeaMONKLFTK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/FukushimaITK09,
  author       = {Takafumi Fukushima and
                  Eiji Iwata and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Development of a new self-assembled die bonder to three-dimensionally
                  stack known good dies in batch},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306524},
  doi          = {10.1109/3DIC.2009.5306524},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/FukushimaITK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KaihoOTKLTK09,
  author       = {Yoshiyuki Kaiho and
                  Yuki Ohara and
                  Hirotaka Takeshita and
                  Kouji Kiyoyama and
                  Kang Wook Lee and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {3D integration technology for 3D stacked retinal chip},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306564},
  doi          = {10.1109/3DIC.2009.5306564},
  timestamp    = {Wed, 17 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/KaihoOTKLTK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/KiyoyamaOLYFTK09,
  author       = {Kouji Kiyoyama and
                  Yuki Ohara and
                  Kang Wook Lee and
                  Y. Yang and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {A parallel {ADC} for high-speed {CMOS} image processing system with
                  3D structure},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306583},
  doi          = {10.1109/3DIC.2009.5306583},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/KiyoyamaOLYFTK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/LeeKOKBFTK09,
  author       = {Kang Wook Lee and
                  Shigeyuki Kanno and
                  Yuki Ohara and
                  Kouji Kiyoyama and
                  Ji Chel Bea and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Heterogeneous integration technology for {MEMS-LSI} multi-chip module},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306599},
  doi          = {10.1109/3DIC.2009.5306599},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/LeeKOKBFTK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/3dic/OharaNSLMBYFTK09,
  author       = {Yuki Ohara and
                  Akihiro Noriki and
                  Katsuyuki Sakuma and
                  Kang Wook Lee and
                  Mariappan Murugesan and
                  Jichoel Bea and
                  Fumiaki Yamada and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {10 {\(\mathrm{\mu}\)}m fine pitch Cu/Sn micro-bumps for 3-D super-chip
                  stack},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306532},
  doi          = {10.1109/3DIC.2009.5306532},
  timestamp    = {Tue, 16 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/OharaNSLMBYFTK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/aspdac/KoyanagiFT09,
  author       = {Mitsumasa Koyanagi and
                  Takafumi Fukushima and
                  Tetsu Tanaka},
  editor       = {Kazutoshi Wakabayashi},
  title        = {Three-dimensional integration technology and integrated systems},
  booktitle    = {Proceedings of the 14th Asia South Pacific Design Automation Conference,
                  {ASP-DAC} 2009, Yokohama, Japan, January 19-22, 2009},
  pages        = {409--415},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/ASPDAC.2009.4796515},
  doi          = {10.1109/ASPDAC.2009.4796515},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/aspdac/KoyanagiFT09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/iros/KonnoUITSDKU06,
  author       = {Atsushi Konno and
                  Ryo Uchikura and
                  Toshiyuki Ishihara and
                  Teppei Tsujita and
                  Takeaki Sugimura and
                  Jun Deguchi and
                  Mitsumasa Koyanagi and
                  Masaru Uchiyama},
  title        = {Development of a High Speed Vision System for Mobile Robots},
  booktitle    = {2006 {IEEE/RSJ} International Conference on Intelligent Robots and
                  Systems, {IROS} 2006, October 9-15, 2006, Beijing, China},
  pages        = {1372--1377},
  publisher    = {{IEEE}},
  year         = {2006},
  url          = {https://doi.org/10.1109/IROS.2006.281925},
  doi          = {10.1109/IROS.2006.281925},
  timestamp    = {Wed, 16 Oct 2019 14:14:51 +0200},
  biburl       = {https://dblp.org/rec/conf/iros/KonnoUITSDKU06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/arcs/SugimuraKNFKK05,
  author       = {Takeaki Sugimura and
                  Yuta Konishi and
                  Yoshihiro Nakatani and
                  Takafumi Fukushima and
                  Hiroyuki Kurino and
                  Mitsumasa Koyanagi},
  editor       = {Uwe Brinkschulte and
                  J{\"{u}}rgen Becker and
                  Dietmar Fey and
                  Christian Hochberger and
                  Thomas Martinetz and
                  Christian M{\"{u}}ller{-}Schloer and
                  Hartmut Schmeck and
                  Theo Ungerer and
                  Rolf P. W{\"{u}}rtz},
  title        = {Dynamic Multi-Context Reconfiguration Scheme for Reconfigurable Parallel
                  Image Processing System with Three Dimensional Structure},
  booktitle    = {18th International Conference on Architecture of Computing Systems,
                  Workshops, Innsbruck, Austria, March 2005},
  pages        = {27--32},
  publisher    = {{VDE} Verlag},
  year         = {2005},
  timestamp    = {Fri, 19 Jul 2019 13:02:47 +0200},
  biburl       = {https://dblp.org/rec/conf/arcs/SugimuraKNFKK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/aina/LiuSKK04,
  author       = {Zhe Liu and
                  JeoungChill Shim and
                  Hiroyuki Kurino and
                  Mitsumasa Koyanagi},
  title        = {Design of {A} Novel Real-Shared Memory Module for High Performance
                  Parallel Processor System with Shared Memory},
  booktitle    = {18th International Conference on Advanced Information Networking and
                  Applications {(AINA} 2004), 29-31 March 2004, Fukuoka, Japan},
  pages        = {241--244},
  publisher    = {{IEEE} Computer Society},
  year         = {2004},
  url          = {https://doi.org/10.1109/AINA.2004.1283795},
  doi          = {10.1109/AINA.2004.1283795},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/aina/LiuSKK04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/pdcat/LiuSKK04,
  author       = {Zhe Liu and
                  JeoungChill Shim and
                  Hiroyuki Kurino and
                  Mitsumasa Koyanagi},
  editor       = {Kim{-}Meow Liew and
                  Hong Shen and
                  Simon See and
                  Wentong Cai and
                  Pingzhi Fan and
                  Susumu Horiguchi},
  title        = {Design and Evaluation of a Novel Real-Shared Cache Module for High
                  Performance Parallel Processor Chip},
  booktitle    = {Parallel and Distributed Computing: Applications and Technologies,
                  5th International Conference, {PDCAT} 2004, Singapore, December 8-10,
                  2004, Proceedings},
  series       = {Lecture Notes in Computer Science},
  volume       = {3320},
  pages        = {564--569},
  publisher    = {Springer},
  year         = {2004},
  url          = {https://doi.org/10.1007/978-3-540-30501-9\_108},
  doi          = {10.1007/978-3-540-30501-9\_108},
  timestamp    = {Fri, 12 Jun 2020 16:01:21 +0200},
  biburl       = {https://dblp.org/rec/conf/pdcat/LiuSKK04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/fpt/SugimuraSKK03,
  author       = {Takeaki Sugimura and
                  JeoungChill Shim and
                  Hiroyuki Kurino and
                  Mitsumasa Koyanagi},
  title        = {Parallel image processing field programmable gate array for real time
                  image processing system},
  booktitle    = {Proceedings of the 2003 {IEEE} International Conference on Field-Programmable
                  Technology, Tokyo, Japan, {FPT} 2003, December 15-17, 2003},
  pages        = {372--374},
  publisher    = {{IEEE}},
  year         = {2003},
  url          = {https://doi.org/10.1109/FPT.2003.1275779},
  doi          = {10.1109/FPT.2003.1275779},
  timestamp    = {Wed, 16 Oct 2019 14:14:52 +0200},
  biburl       = {https://dblp.org/rec/conf/fpt/SugimuraSKK03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/dac/BrodersenHKKLK02,
  author       = {Robert W. Brodersen and
                  Anthony M. Hill and
                  John Kibarian and
                  Desmond Kirkpatrick and
                  Mark A. Lavin and
                  Mitsumasa Koyanagi},
  title        = {Nanometer design: what hurts next...?},
  booktitle    = {Proceedings of the 39th Design Automation Conference, {DAC} 2002,
                  New Orleans, LA, USA, June 10-14, 2002},
  pages        = {242},
  publisher    = {{ACM}},
  year         = {2002},
  url          = {https://doi.org/10.1145/513918.513981},
  doi          = {10.1145/513918.513981},
  timestamp    = {Tue, 06 Nov 2018 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/dac/BrodersenHKKLK02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nips/KurinoNLNYPK00,
  author       = {Hiroyuki Kurino and
                  Masaki Nakagawa and
                  Kang Wook Lee and
                  Tomonori Nakamura and
                  Yuusuke Yamada and
                  Ki Tae Park and
                  Mitsumasa Koyanagi},
  editor       = {Todd K. Leen and
                  Thomas G. Dietterich and
                  Volker Tresp},
  title        = {Smart Vision Chip Fabricated Using Three Dimensional Integration Technology},
  booktitle    = {Advances in Neural Information Processing Systems 13, Papers from
                  Neural Information Processing Systems {(NIPS)} 2000, Denver, CO, {USA}},
  pages        = {720--726},
  publisher    = {{MIT} Press},
  year         = {2000},
  url          = {https://proceedings.neurips.cc/paper/2000/hash/ff7d0f525b3be596a51fb919492c099c-Abstract.html},
  timestamp    = {Mon, 16 May 2022 15:41:51 +0200},
  biburl       = {https://dblp.org/rec/conf/nips/KurinoNLNYPK00.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/micro/KoyanagiKLSMI98,
  author       = {Mitsumasa Koyanagi and
                  Hiroyuki Kurino and
                  Kang Wook Lee and
                  Katsuyuki Sakuma and
                  Nobuaki Miyakawa and
                  Hikotaro Itani},
  title        = {Future system-on-silicon {LSI} chips},
  journal      = {{IEEE} Micro},
  volume       = {18},
  number       = {4},
  pages        = {17--22},
  year         = {1998},
  url          = {https://doi.org/10.1109/40.710867},
  doi          = {10.1109/40.710867},
  timestamp    = {Wed, 17 Feb 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/micro/KoyanagiKLSMI98.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/aspdac/HiranoOKK98,
  author       = {Keiichi Hirano and
                  Taizou Ono and
                  Hiroyuki Kurino and
                  Mitsumasa Koyanagi},
  title        = {A New Multiport Memory for High Performance Parallel Processor System
                  with Shared Memory},
  booktitle    = {Proceedings of the {ASP-DAC} '98, Asia and South Pacific Design Automation
                  Conference 1998, Pacifico Yokohama, Yokohama, Japan, February 10-13,
                  1998},
  pages        = {333--334},
  publisher    = {{IEEE}},
  year         = {1998},
  url          = {https://doi.org/10.1109/ASPDAC.1998.669491},
  doi          = {10.1109/ASPDAC.1998.669491},
  timestamp    = {Fri, 04 Dec 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/aspdac/HiranoOKK98.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/vlsi/Koyanagi91,
  author       = {Mitsumasa Koyanagi},
  editor       = {Arne Halaas and
                  Peter B. Denyer},
  title        = {A New Chip Architecture for VLSIs - Optical Coupled 3D Common Memory
                  and Optical Interconnections},
  booktitle    = {{VLSI} 91, Proceedings of the {IFIP} {TC10/WG} 10.5 International
                  Conference on Very Large Scale Integration, Edinburgh, Scotland, 20-22
                  August, 1991},
  series       = {{IFIP} Transactions},
  volume       = {{A-1}},
  pages        = {377--386},
  publisher    = {North-Holland},
  year         = {1991},
  timestamp    = {Fri, 02 Aug 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/vlsi/Koyanagi91.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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