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Kazutaka Takahashi 0002

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affiliation: Seiko I Techno Research Co., Ltd., Chiba, Japan

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2007
[j1]
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Hirotaka Komoda, Chie Moritani, Kazutaka Takahashi, Heiji Watanabe, Kiyoshi Yasutake:
Sample tilting technique for preventing electrostatic discharge during high-current FIB gas-assisted etching with XeF₂. Microelectron. Reliab. 47(1): 74-81 (2007)

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