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G. Dollinger

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2001
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A. Stadler, I. Genchev, A. Bergmaier, G. Dollinger, Vesselinka Petrova-Koch, Walter Hansch, H. Baumgärtner, I. Eisele:
Nitrogen implantations for rapid thermal oxinitride layers. Microelectron. Reliab. 41(7): 977-980 (2001)

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