Polarization Camera based Fringe Locking Control of a Writing Head for Scanning Beam Interference Lithography.

Wed, 01 Jan 2025 00:00:00 +0100

Josias Rühle, Kevin Treptow, Christian Schober, Christof Pruss , Tobias Haist, Ingo Ortlepp, Oliver Sawodny, Stephan Reichelt, Thomas Kissinger, Eberhard Manske:
Polarization Camera based Fringe Locking Control of a Writing Head for Scanning Beam Interference Lithography. ACC 2025: 3254-3259