Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems.

Mon, 01 Jan 2024 00:00:00 +0100

Ivo W. Rangelow, Thomas Schenkel, Arun Persaud , Zahid Durrani, Mervyn Jones, Hans-Georg Pietscher, Fabian Dietrich, Aditya S. Tan, Jaqueline Stauffenberg, Eberhard Manske, Thomas Fröhlich, Dimitre Karpuzov:
Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems. MIXDES 2024: 23-28