Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control.

Fri, 01 Jan 2021 00:00:00 +0100

Alex S. Huaman, Michael Katzschmann, Steffen Hesse, Christoph Schäffel, Christoph Weise, Denis Dontsov, Eberhard Manske, Johann Reger :
Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control. ICM 2021: 1-6