Cross-sectional nanoprobing fault isolation technique on submicron devices.

Fri, 01 Jan 2016 00:00:00 +0100

Pik Kee Tan, Huei Hao Yap, Changqing Chen, Francis Rivai, Yuzhe Zhao, Lei Zhu, Hua Feng, Hao Tan, Ran He, D. D. Wang, Y. M. Huang, Yin Zhe Ma, Jeffrey Lam, Zhi Hong Mai:
Cross-sectional nanoprobing fault isolation technique on submicron devices. Microelectron. Reliab. 64: 321-325 (2016)