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Michael B. Petach

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2000 – 2009

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2002
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Harry Shields, Steven W. Fornaca, Michael B. Petach, Rocco A. Orsini, Richard H. Moyer, Randall J. St Pierre:
Laser-produced plasma light source for extreme ultraviolet lithography. Proc. IEEE 90(10): 1689-1695 (2002)

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