Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display.

Sun, 01 Jan 2012 00:00:00 +0100

Dedong Han, Yi Wang, Shengdong Zhang , Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino:
Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display. Sci. China Inf. Sci. 55(6): 1441-1445 (2012)