Self-aligned offset gate poly-Si TFTs using photoresist trimming technology.

Thu, 01 Jan 2015 00:00:00 +0100

Longyan Wang, Lei Sun, Dedong Han, Yi Wang, Mansun Chan, Shengdong Zhang :
Self-aligned offset gate poly-Si TFTs using photoresist trimming technology. Sci. China Inf. Sci. 58(4): 1-6 (2015)