Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature.

Sun, 01 Jan 2012 00:00:00 +0100

Dedong Han, Yi Wang, Shengdong Zhang , Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino:
Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature. Sci. China Inf. Sci. 55(4): 951-955 (2012)