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S. Orain

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2007
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Florian Cacho, S. Orain, G. Cailletaud, H. Jaouen:
A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies. Microelectron. Reliab. 47(2-3): 161-167 (2007)
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S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen:
FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectron. Reliab. 47(2-3): 295-301 (2007)

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