BibTeX record conf/case/AhnM10

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@inproceedings{DBLP:conf/case/AhnM10,
  author    = {Younghun Ahn and
               James R. Morrison},
  title     = {Analysis of circular cluster tools: Transient behavior and semiconductor
               equipment models},
  booktitle = {{IEEE} Conference on Automation Science and Engineering, {CASE} 2010,
               Toronto, ON, Canada, 21-24 August, 2010},
  pages     = {39--44},
  year      = {2010},
  crossref  = {DBLP:conf/case/2010},
  url       = {https://doi.org/10.1109/COASE.2010.5584530},
  doi       = {10.1109/COASE.2010.5584530},
  timestamp = {Wed, 16 Oct 2019 14:14:53 +0200},
  biburl    = {https://dblp.org/rec/bib/conf/case/AhnM10},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/case/2010,
  title     = {{IEEE} Conference on Automation Science and Engineering, {CASE} 2010,
               Toronto, ON, Canada, 21-24 August, 2010},
  publisher = {{IEEE}},
  year      = {2010},
  url       = {https://ieeexplore.ieee.org/xpl/conhome/5570123/proceeding},
  isbn      = {978-1-4244-5447-1},
  timestamp = {Wed, 16 Oct 2019 14:14:53 +0200},
  biburl    = {https://dblp.org/rec/bib/conf/case/2010},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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