BibTeX record conf/icmech/TokuyamaFYS13

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@inproceedings{DBLP:conf/icmech/TokuyamaFYS13,
  author       = {Kyota Tokuyama and
                  Hiroshi Fujimoto and
                  Daisuke Yumiza and
                  Kazuaki Saiki},
  title        = {Proposal of reducing impact force control system for scan stage with
                  decouplable structure of coarse and fine parts},
  booktitle    = {{IEEE} International Conference on Mechatronics, {ICM} 2013, Vicenza,
                  VI, Italy, February 27 - March 1, 2013},
  pages        = {810--815},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/ICMECH.2013.6519145},
  doi          = {10.1109/ICMECH.2013.6519145},
  timestamp    = {Wed, 16 Oct 2019 14:14:55 +0200},
  biburl       = {https://dblp.org/rec/conf/icmech/TokuyamaFYS13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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