BibTeX record conf/isqed/PengZWY10

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@inproceedings{DBLP:conf/isqed/PengZWY10,
  author       = {Yao Peng and
                  Jinyu Zhang and
                  Yan Wang and
                  Zhiping Yu},
  title        = {High performance source optimization using a gradient-based method
                  in optical lithography},
  booktitle    = {11th International Symposium on Quality of Electronic Design {(ISQED}
                  2010), 22-24 March 2010, San Jose, CA, {USA}},
  pages        = {108--113},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/ISQED.2010.5450390},
  doi          = {10.1109/ISQED.2010.5450390},
  timestamp    = {Thu, 13 Oct 2022 17:08:41 +0200},
  biburl       = {https://dblp.org/rec/conf/isqed/PengZWY10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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