BibTeX record conf/nems/CuiLZHGH15

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@inproceedings{DBLP:conf/nems/CuiLZHGH15,
  author    = {W. P. Cui and
               G. D. Liu and
               F. S. Zhang and
               H. Hu and
               C. C. Gao and
               Y. L. Hao},
  title     = {Silicon-silicon anodic bonding process with embedded glass},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {470--475},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147470},
  doi       = {10.1109/NEMS.2015.7147470},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CuiLZHGH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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