BibTeX record conf/nems/LiLLSC15

download as .bib file

@inproceedings{DBLP:conf/nems/LiLLSC15,
  author       = {Pengcheng Li and
                  Xiaoying Li and
                  Enfu Li and
                  Qiang Shen and
                  Honglong Chang},
  title        = {Design and fabrication of an in-plane {SOI} {MEMS} accelerometer with
                  a high yield rate},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {511--514},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147480},
  doi          = {10.1109/NEMS.2015.7147480},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiLLSC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.