BibTeX record conf/nems/MiaoSCWHXX15

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@inproceedings{DBLP:conf/nems/MiaoSCWHXX15,
  author       = {Jing Miao and
                  Wenjiang Shen and
                  Muyu Chen and
                  Hui Wang and
                  Changde He and
                  Chenyang Xue and
                  Jijun Xiong},
  title        = {Design and measurement of {MEMS} capacitive ultrasonic transducer},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {602--604},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147501},
  doi          = {10.1109/NEMS.2015.7147501},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/MiaoSCWHXX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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