BibTeX record conf/nems/QiuZOYWY10

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@inproceedings{DBLP:conf/nems/QiuZOYWY10,
  author       = {Xiaotun Qiu and
                  Jie Zhu and
                  Jonathon Oiler and
                  Cunjiang Yu and
                  Ziyu Wang and
                  Hongyu Yu},
  title        = {Film Bulk Acoustic-wave Resonator {(FBAR)} based humidity sensor},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {445--449},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592429},
  doi          = {10.1109/NEMS.2010.5592429},
  timestamp    = {Thu, 14 Oct 2021 10:18:53 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/QiuZOYWY10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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