BibTeX record conf/nems/ZhaoLYL13

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@inproceedings{DBLP:conf/nems/ZhaoLYL13,
  author       = {Chenxu Zhao and
                  Mengwei Li and
                  Ming Yin and
                  Zewen Liu},
  title        = {Micro-Raman spectroscopy analysis of residual stress in polysilicon
                  {MEMS} resonators},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {570--573},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559795},
  doi          = {10.1109/NEMS.2013.6559795},
  timestamp    = {Mon, 08 Mar 2021 08:20:37 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ZhaoLYL13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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