BibTeX record journals/mj/BidadiSMHK03

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@article{DBLP:journals/mj/BidadiSMHK03,
  author       = {H. Bidadi and
                  S. Sobhanian and
                  M. Mazidi and
                  Sh. Hasanli and
                  S. Khorram},
  title        = {The peculiarities of mechanical bending of silicon wafers after diverse
                  manufacturing operations},
  journal      = {Microelectron. J.},
  volume       = {34},
  number       = {5-8},
  pages        = {515--519},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2692(03)00100-9},
  doi          = {10.1016/S0026-2692(03)00100-9},
  timestamp    = {Sat, 22 Feb 2020 19:34:27 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/BidadiSMHK03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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