BibTeX record journals/mr/DardalhonBLNPNO02

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@article{DBLP:journals/mr/DardalhonBLNPNO02,
  author       = {M. Dardalhon and
                  Vincent Beroulle and
                  Laurent Latorre and
                  Pascal Nouet and
                  Guy Perez and
                  Jean Marc Nicot and
                  Coumar Oud{\'{e}}a},
  title        = {Reliability analysis of {CMOS} {MEMS} structures obtained by Front
                  Side Bulk Micromachining},
  journal      = {Microelectron. Reliab.},
  volume       = {42},
  number       = {9-11},
  pages        = {1777--1782},
  year         = {2002},
  url          = {https://doi.org/10.1016/S0026-2714(02)00230-5},
  doi          = {10.1016/S0026-2714(02)00230-5},
  timestamp    = {Thu, 14 Oct 2021 09:38:47 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/DardalhonBLNPNO02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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