BibTeX record journals/mr/SchwalkeS05

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@article{DBLP:journals/mr/SchwalkeS05,
  author       = {Udo Schwalke and
                  Yordan Stefanov},
  title        = {Process integration and nanometer-scale electrical characterization
                  of crystalline high-k gate dielectrics},
  journal      = {Microelectron. Reliab.},
  volume       = {45},
  number       = {5-6},
  pages        = {790--793},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.microrel.2004.11.047},
  doi          = {10.1016/J.MICROREL.2004.11.047},
  timestamp    = {Sat, 22 Feb 2020 19:27:47 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/SchwalkeS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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