BibTeX record journals/mr/WongG02

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@article{DBLP:journals/mr/WongG02,
  author       = {Hei Wong and
                  V. A. Gritsenko},
  title        = {Defects in silicon oxynitride gate dielectric films},
  journal      = {Microelectron. Reliab.},
  volume       = {42},
  number       = {4-5},
  pages        = {597--605},
  year         = {2002},
  url          = {https://doi.org/10.1016/S0026-2714(02)00005-7},
  doi          = {10.1016/S0026-2714(02)00005-7},
  timestamp    = {Sat, 22 Feb 2020 19:27:24 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/WongG02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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