BibTeX record journals/sensors/ZhangYHYYHSN19

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@article{DBLP:journals/sensors/ZhangYHYYHSN19,
  author       = {Meng Zhang and
                  Jian Yang and
                  Yurong He and
                  Fan Yang and
                  Fuhua Yang and
                  Guowei Han and
                  Chaowei Si and
                  Jin Ning},
  title        = {Research on a 3D Encapsulation Technique for Capacitive {MEMS} Sensors
                  Based on Through Silicon Via},
  journal      = {Sensors},
  volume       = {19},
  number       = {1},
  pages        = {93},
  year         = {2019},
  url          = {https://doi.org/10.3390/s19010093},
  doi          = {10.3390/S19010093},
  timestamp    = {Sat, 19 Oct 2019 19:35:04 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/ZhangYHYYHSN19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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