"Optical TSV Using Si-Photonics Integrated Curved Micro-Mirror."

Akihiro Noriki et al. (2019)

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DOI: 10.1109/3DIC48104.2019.9058779

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-19

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Akihiro Noriki, Isao Tamai, Yasuhiro Ibusuki, Akio Ukita, Satoshi Suda, Daisuke Shimura, Yosuke Onawa, Hiroki Yaegashi, Takeru Amano:
Optical TSV Using Si-Photonics Integrated Curved Micro-Mirror. 3DIC 2019: 1-4

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