"Importance of alignment control during permanent bonding and its impact on ..."

Joeri De Vos et al. (2016)

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DOI: 10.1109/3DIC.2016.7970002

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Joeri De Vos, Lan Peng, Alain Phommahaxay, Joost Van Ongeval, Andy Miller, Eric Beyne, Florian Kurz, Thomas Wagenleiter, Markus Wimplinger, Thomas Uhrmann:
Importance of alignment control during permanent bonding and its impact on via-last alignment for high density 3D interconnects. 3DIC 2016: 1-5

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