"Control of a high precision stage using a walking piezo actuator."

Roel J. E. Merry et al. (2007)

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DOI: 10.1109/CCA.2007.4389412

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-29

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Roel J. E. Merry, Niels de Kleijn, René van de Molengraft, Maarten Steinbuch:
Control of a high precision stage using a walking piezo actuator. CCA 2007: 1285-1290

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