"Adaptive high precision control for piezo-actuated nano-positioner."

Toshikuni Ozaki, Xinkai Chen (2010)

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DOI: 10.1109/ISIC.2010.5612884

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-07

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Toshikuni Ozaki, Xinkai Chen:
Adaptive high precision control for piezo-actuated nano-positioner. ISIC 2010: 2278-2283

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