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"Design of a dual-stage, three-axis hybrid parallel-serial-kinematic ..."

William S. Nagel, Kam K. Leang (2017)

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DOI: 10.1109/AIM.2017.8014100

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-02

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  - conf/aimech/NagelL17
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William S. Nagel, Kam K. Leang:
Design of a dual-stage, three-axis hybrid parallel-serial-kinematic nanopositioner with mechanically mitigated cross-coupling. AIM 2017: 706-711

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