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"Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode ..."

Michael G. Ruppert, Yuen Kuan Yong (2018)

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DOI: 10.1109/AIM.2018.8452229

access: closed

type: Conference or Workshop Paper

metadata version: 2019-09-25

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Michael G. Ruppert, Yuen Kuan Yong:
Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy. AIM 2018: 144-149

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