"Neural-Net Based Optical Ellipsometry for Monitoring Growth of ..."

Gwang Hoon Park et al. (1994)

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DOI: 10.1016/B978-0-08-042236-7.50022-5

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-02

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Gwang Hoon Park, Yoh-Han Pao, Kurt G. Eyink, Steven R. LeClair, M. S. Soclof:
Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films. AIRTC 1994: 123-128

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